
Microrobotics and Control Engineering
Services
We will be glad to cooperate with you on a contract basis. Below you will find an extract of our laboratory equipment for such works. For further information please feel free to contact our engineering research assistant.
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Scanning Electron Microcopy SEM
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Tescan LYRA 3 FEG / XMH (High-Resolution FE-SEM / Focused Ion Beam)
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FEI Quanta 600 (Environmental SEM, Tungsten )
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Zeiss LEO 1450 (SEM, Tungsten)
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Sputtercoater, Plasma cleaner, Manipulators (broad range of manufacturers and own developments)
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Atomic Force Microscopy AFM
- AFM JPK NanoWizard
- Integrated AFM inside an SEM (own development)
- AFM JPK NanoWizard
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Optical Microscopy
- Nikon Eclipse Ti
- Zeiss Axiovert 200M
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Further measurement instrumentation (only a fraction!)
- Agilent B1500A (Semiconductor Device Analyzer)
- Agilent E5061A (RF Network Analyzer)
- RF-Signalgenerator, Lock-In-Amplifier, Oscilloscopes, Picoamperemeter, ...
